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TiN와 Pt전극 위에 증기상 반응 스퍼터링 방법을 통한 $PbTiO_3$ 박막의 제조와 특성분석 = Fabrication and characterization of $PbTiO_3$ thin films deposited on TiN and Pt electrodes via vapor phase reaction sputtering
2011
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