Electrochromic Response Time of MoO_3 film Fabricated by Reactive Sputtering

Molybdenum oxide thin films have been prepared by dc reactive magnetron sputtering from a metallic Mo target in an Ar+O2 mixed atmosphere.The electrochromic(EC) properties of the films are studied with different deposition pressure in the deposition process.The MoO3 films are characterized with x-ray diffraction(XRD),atomic force microscopy(AFM) and Fourier transform infrared(FT-IR) spectroscopy.The electrochromic properties of the samples are measured by means of spectrophotometry.In addition,electrochromic property and response time of MoO3 film have been investigated.X-ray diffraction indicates an amorphous structure for the films.For the deposition pressure is 3 Pa,the MoO3 film shows better electrochromic property.The modulating range of the visible optical transmittance can reach 69%,the colored response time is 5 s,and the bleached response time is 27s.