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Microstructure of sputter deposited Ni-Sb ohmic contacts on GaAs
Microstructure of sputter deposited Ni-Sb ohmic contacts on GaAs
1989
S. Yegnasubramanian
V. C. Kannan
R Dutto
P. J. Sakach
Keywords:
Ohmic contact
Materials science
Microstructure
Sputtering
Metallurgy
Correction
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