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The Effect of Charge Build-up on Gate Oxide Breakdown during Dry Etching
The Effect of Charge Build-up on Gate Oxide Breakdown during Dry Etching
1987
Kazuyuki Tsunokuni
Kazuo Nojiri
Sumi Kuboshima
Kado Hirobe
Keywords:
Gate oxide
Dry etching
Inorganic chemistry
Materials science
Optoelectronics
Correction
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