Research on the properties of ZnO films by 1/f noise measurement

ZnO films were deposited by dc sputtering technique on glass and Pt/Si substrates. The effect of growth parameters is investigated on sheet resistance and noise. The 1/f noise normalized for bias, frequency and unit area, C us is proportional with the sheet resistance R sh . We found that the noise results correlate strongly with the crystalline structure of ZnO. For comparison, we have also studied the ZnO films structural properties.