Anforderungen der Mikrosystemtechnik an die Materialforschung

In addition to intelligent information processing, high performance microsystems also need microsensors and microactuators. Manufacturing such components requires both the adaptation of well known materials for use in the micrometer range as well as the development of brand new materials. This article describes the materials research carried out in the field of microsystems technology with reference to three examples of work undertaken at the Forschungszentrum Karlsruhe. So called Smart Materials are now commonly used in many new types of microsensors and -actuators. For example, with magnetostrictive thin films, a considerable improvement in the efficiency of micromotors and torque sensors can be achieved using multi-layer films. High performance microspectrometers now used in many new applications can be made from plastics thus taking advantage of very cost effective moulding techniques. The high precision moulding tools for these are made using deep X-ray lithography and micro-electroplating (LIGA process) in which the metallic microstructure and thus the hardness of the tool can be significantly influenced by the plating conditions used. High performance micropumps are also made by a combination of thin film technology, high precision adhesive bonding techniques and plastic moulding.