Investigation of ITO Thin Film Deposited On Organic Films by RF Magnetron Sputter

Shuo Sun,Gui-ling Zhang,Fu Jia Zhang

Investigation of ITO Thin Film Deposited On Organic Films by RF Magnetron Sputter

2007

Shuo Sun
Gui-ling Zhang
Fu Jia Zhang

ITO thin film deposited on organic substrate by RF magnetron sputter in low temperture. The relationship between film's surface morphology, resistivity, transmittance and substrate temperature, sputter power and film's thickness were analyzinged.

Keywords:

Transmittance
Sputter deposition
Thin film
Sputtering
Ellipsometry
Cavity magnetron
Analytical chemistry
Electrical resistivity and conductivity
Atomic force microscopy
Materials science
Substrate (chemistry)
Optoelectronics

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