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Formation Temperature Dependence of Thermal Stability of Nickel Silicide with Ni-V Alloy for Nanoscale MOSFETs
Formation Temperature Dependence of Thermal Stability of Nickel Silicide with Ni-V Alloy for Nanoscale MOSFETs
2005
A. Tuya
S. Y. Oh
J G Yun
Y. J. Kim
W.J. Lee
H. H. Ji
Y. Y. Zhang
Z. Zhong
H. D. Lee
Keywords:
Alloy
Nanoscopic scale
Thermal stability
Nickel silicide
Metallurgy
Materials science
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