Theoretical analysis of surface microwave discharge resonantly excited by surface plasmon polaritons

The generation mechanism of surface microwave discharge is studied by analyzing the simplified surface-wave plasma model, from which we show the spatial distribution characteristics of the surface electromagnetic waves. According to the characteristics of overdense plasma interacting with high-frequency electromagnetic waves, we get there is the surface plasmon polaritons (SPPs) phenomenon placed at the interface between overdense plasmas and dielectric. The characteristic parameters of SPPs in overdense plasmas are obtained by altering the plasma density and the collision frequency.