A method for processing a contact pad

A method for processing a contact pad (301), the method comprising: Providing a contact pad (301), wherein an uppermost layer (301 ') of the contact pad (301) is aluminum or an aluminum alloy, wherein at least a portion of the top layer (301' is) of the contact pad (301) exposed; comprising purifying the contact pads (301) by means of a thermally activated atmosphere (321), the water and / or reactive components of water; wherein a pad-surface passivation layer (342) on the exposed portion of said top layer (301 ') of the contact pad (301) is formed by the contact pad (301) of the same thermally activated atmosphere (321) is exposed.