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Integration of excimer laser micromachining in a biomedical sensor microfabrication process
Integration of excimer laser micromachining in a biomedical sensor microfabrication process
2016
Patrick Gailly
Juriy Hastanin
Cedric Lenaerts
Karl Fleury-Frenette
Keywords:
Biochip
Excimer laser
Microfabrication
Surface micromachining
Analytical chemistry
Materials science
Nanotechnology
Plasmon
Correction
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