MOS-Type One-Dimensional Position-Sensitive Detectors with a Linearly Detectable Face of 30 mm Long

Experiments have been conducted for the MOS-type position-sensitive detector (PSD) to make one-dimensional PSDs of large detection range, based on the previous theoretical suggestion that the MOS-type PSD under some conditions linearly detects a light-spot position in the full range of its detectable face. The almost perfect linearity and also fine resolution higher than 1 µm have been demonstrated for an Al-SiO2-Si one-dimensional PSD with a detectable face of 30 mm long.