Synthesis and gas-sensing properties of CuO nanowires array film by magnetron sputtering method

The thin copper films were deposited by magnet sputtering on fluorine-doped tin oxide (FTO) coated glass. The CuO nanowires array film can be obtained through the heat oxidation process. The morphology and microstructure of the copper film and the CuO nanowires film was characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and high-resolution transmission electron microscopy (HRTEM), respectively. The CO and H 2 S sensing characteristics of the CuO nanowires array film were also investigated. The results show that CuO nanowires array film exhibited highest response to CO gas at 250°C. The response was significantly enhanced when the CO gas concentration was increased. There is a sensing response at low gas concentration for H 2 S at room temperature. While for the higher temperature, the resistance of the CuO nanowires array film decreased rapidly, which is different from the CO gas. The abnormal resistance change for the H 2 S was also illustrated in this article.