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Reactive magnetron sputtering of TiN-Pb coatings using two metal targets
Reactive magnetron sputtering of TiN-Pb coatings using two metal targets
2021
A. A. Lozovan
M. A. Lyakhovetsky
Yu. S. Pavlov
D K Kostrin
Keywords:
reactive magnetron
Metal
Sputtering
Tin
Metallurgy
Materials science
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