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2721 Development of deposition technique for TiNi SMA thin films by ion beam sputter method
2721 Development of deposition technique for TiNi SMA thin films by ion beam sputter method
2006
Fugang Liu
Keita Kiuchi
Kazuyoshi Tsuchiya
Nobuo Yasunaga
Keywords:
Thin film
Ion beam
SMA*
Sputtering
Ceramic materials
Composite material
Materials science
Deposition (law)
Correction
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