Electrical, optical, and structural properties of indium-tin-oxide thin films deposited on polyethylene terephthalate substrates by rf sputtering

1998 
Indium-tin-oxide (ITO) is a transparent conducting material which is deposited as a thin film on glass substrates for use in opto-electronic devices. However, there are several applications for which ITO films on polymeric substrates are desirable. The sheet resistance, optical transmittance, and microstructure of as-deposited ITO thin films on unheated polyethylene terephthalate substrates were studied using rf sputter deposition. During separate deposition runs, the partial pressure of oxygen was varied from 5% to 20% and the deposition time was varied from 15 to 120 min. No significant variations are observed in the sheet resistance with respect to oxygen partial pressure; however, changes in sheet resistance were observed in ITO films deposited on different substrates for short deposition times (15 min). Additionally, the thickness of the film (assumed to be proportional to the deposition time) is shown to have a considerable impact on the sheet resistance and the optical transmittance. The x-ray diff...
    • Correction
    • Source
    • Cite
    • Save
    • Machine Reading By IdeaReader
    12
    References
    35
    Citations
    NaN
    KQI
    []