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Hybrid lithography for x-ray diffractive optical elements
Hybrid lithography for x-ray diffractive optical elements
2014
Changqing Xie
Xiaoli Zhu
Hailiang Li
Jiebin Niu
Nan Gao
Yilei Hua
Lina Shi
liuming
Keywords:
X-ray lithography
X-ray
Lithography
Optics
Next-generation lithography
Materials science
Optoelectronics
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