PZT thin films by laser ablation

Lead zirconate titanate (PZT) thin films were deposited by laser ablation using both CO/sub 2/ and excimer lasers. The films were deposited in a vacuum as well as in an oxygen ambient, and the compositions were analyzed by Rutherford backscattering spectrometry and energy dispersive spectroscopy. It was found that the CO/sub 2/ laser which has a long pulselength yields films with excess Pb, whereas the excimer laser which has a characteristically shorter pulselength yields Pb deficient films. >