Preparation of DyPt 2 Films by Using Magneto Controlled Sputtering and Phase Transformation of Dy/Pt Alloy Films

DyPt2 films were prepared by alternate deposition thin Dy and Pt layers on glass substrates by DC magneto controlled sputtering method. The XRD data indicated that for as-deposited Dy/Pt films, and the periodic layered structures along thickness direction were evidenced with low angle X-ray scattering. With increasing annealing temperature, the compounds of DyPt, DyPt2 and DyPt3 were formed successively at temperature ranging from 300 to 400 ℃. It was found that the composition reaction DyPt+DyPt3→2DyPt2 took place at 500 ℃. After annealing at 500 ℃ for 1 h, the compounds DyPt and DyPt3 transformed completely into the DyPt2 compound.