Anodic alumina as a material for MEMS

A new promising material for MEMS elements - anodic aluminium oxide is described. There were developed few methods of anodic aluminium oxide MEMS elements production on the base of microelectronic technology. Described methods of 3D MEMS elements obtaining can essentially supplement and in some cases substitute existing LIGA-like technologies owing to their cheapness and simplicity. It is necessary to point out that the realization of MEMS elements by described methods requires no complex and expensive equipment.