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Investigation of Plasma Treatment Conditions for Wafer-Scale Room-Temperature Bonding Using Ultrathin Au Films in Ambient Air
Investigation of Plasma Treatment Conditions for Wafer-Scale Room-Temperature Bonding Using Ultrathin Au Films in Ambient Air
2019
Michitaka Yamamoto
Takashi Matsumae
Yuichi Kurashima
Hideki Takagi
Tadatomo Suga
Toshihiro Itoh
Eiji Higurashi
Keywords:
Analytical chemistry
Wafer
Plasma
Optoelectronics
Engineering
ambient air
plasma treatment
Correction
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