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Effect of Nano-Interface of Ru Underlayer in the Carrousel Sputtering Method
Effect of Nano-Interface of Ru Underlayer in the Carrousel Sputtering Method
2011
R. Imaizumi
M. Munakata
M. Ohkoshi
K. Maki
Shin-ichi Aoqui
Keywords:
Sputtering
Surface energy
Nano-
Ceramic materials
Materials science
Composite material
Chemical engineering
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