Ellipsometry and LIMM investigations of the interaction between PZT thin films and platinum electrodes and air

In this work, we present new results of investigation of PbZr 0.235 Ti 0.765 O 3 (PZT) films deposited onto Si/SiO 2 / adhesion layer/(111) Pt substrate by RF sputtering. This paper continues and supplements our previous work reported in [1]. Both spectral ellipsometry and the laser-intensity-modulation method (LIMM) were used for thin film profiling. These two independent methods allow us to increase the accuracy of our investigation. Optical constants of PZT films, refraction index depth profile and polarization profile were determined.