Fabrication And Characterization Of PZT Thin Films For Micromotors

Piezoelectric membranes consisting of sputter and solgel deposited PbZr/sub x/T/sub 1-x/O/sub 3/ (PZT) films on silicon diaphragms have been fabricated, investigated, and applied for micromotors. The behavior of resonance frequencies was studied as a function of membrane thickness and dc- bias. Membranes of 4 mm diameter have been successfully applied as stator of a micro motor. The motor could be operated with voltages as low as 1.0 V/sub rms/. A 100 h degradation test of resonance frequency and amplitude has revealed a 5 % drop in amplitude, possibly due to depolarization.