Mechanical properties of Ti-Si-N thin films produced by reactive magnetron sputtering Propiedades mecánicas de recubrimientos de Ti-Si-N sintetizado por pulverización catódica reactiva

Ti-Si-N coatings were deposited by DC reactive magnetron sputtering on stainless steel AISI 304 substrates varying the N2 flow, in order to study the effect on the structural, mechanical and tribological properties. The coatings were deposited using a 99.999 % purity Ti-Si (9010 at.%) target. Structural characterization was performed