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Chemical Nanolithography with Electron Beams
Chemical Nanolithography with Electron Beams
2001
Armin Gölzhäuser
Wolfgang Eck
Wolfgang Geyer
Volker Stadler
Thomas Weimann
P. Hinze
Michael Grunze
Keywords:
Nanotechnology
Nanolithography
X-ray lithography
Stencil lithography
Materials science
Electron-beam lithography
Electron
Self-assembled monolayer
Electron beam-induced deposition
Beam (structure)
Correction
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