New approaches to fabrication of multilayer Fresnel zone plate for high-energy synchrotron radiation X-rays

Abstract A multilayer (sputtered-sliced) Fresnel zone plate (FZP) is one of the promising focusing optics with high spatial resolution for the high-energy X-ray region. This is because a large “aspect ratio” can be realized easily. In addition, it is important that the kinoform FZP (theoretical diffraction efficiency=100%) can be fabricated by the sputtered-sliced method. This paper presents the experimental results of two new approaches for fabrication of a multilayer FZP for X-rays. (1) To achieve higher diffraction efficiency, a multilevel-type (4-step: quasi-kinoform type) FZP was fabricated. This FZP was composed of concentric multilayers of alternating high-Z, low-Z, and composite materials. The composite material layer was deposited by co-sputtering of high-Z and low-Z materials. (2) To achieve smoother zones (multilayer interfaces) at the conventional-type FZP, each target of a sputtering apparatus with two DC-sputtering guns was surrounded by a cover with an aperture, and Ar gas was supplied inside the cover, which led to the deposition at lower Ar gas pressure. As a result, for the former, the efficiency was improved markedly as compared with conventional FZP, and for the latter, the zone roughness was reduced, which has resulted in the improvement of the spatial resolution of the FZP.