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Application of Diamond-Like Nanocomposite Coatings on LIGA Microsystem Parts.
Application of Diamond-Like Nanocomposite Coatings on LIGA Microsystem Parts.
2008
Somuri V. Prasad
Paul Gabriel Kotula
Joseph R. Michael
Thomas W. Scharf
Todd R. Christenson
Keywords:
Diamond
Materials science
LIGA
Nanocomposite
Microsystem
Composite material
Correction
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