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Synthesis of carbon nitride films by high-density helicon plasma sputtering
Synthesis of carbon nitride films by high-density helicon plasma sputtering
2001
Yuichi Setsuhara
Yoshiyuki Takaki
Shoji Miyake
Masao Kumagai
Y. Sakawa
Tatsuo Shoji
fusi hara yuuiti
takagi yosiyuki
miyake masasi
kumagaya masao
sakawa youiti
syouzi tatu otoko
Keywords:
Thin film
Carbon nitride
Plasma
Sputtering
Materials science
high density
Helicon
nitrogen plasma
Optoelectronics
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