THE REALIZATION OF CRITICAL TECHNIQUES OF SAW TORQUE SENSOR

Several critical techniques embedded in the design and implementations of surface acoustic wave (SAW) torque sensor are discussed. The sensitive theoretical model of SAW torque sensor is introduced; substrate cutting angle of SAW resonator (SAWR) is optimized, and SAW resonators are fabricated. Experiments were done to evaluate the repeatability and nonlinearity. Experiment results show that the linearity and repeatability of the SAW torque sensor were no more than 0.5% respectively.