Design technology co-optimization of 3D-monolithic standard cells and SRAM exploiting dynamic back-bias for ultra-low-voltage operation

We have fabricated 3D-monolithic transistors on two tiers. We experimentally evidence the asymmetric double-gate (DG) behavior of a top-tier transistor, resulting in a better ON-state current (Ion) / OFF-state current (I off ) tradeoff than in single-gate (SG) mode. Moreover, a 3D-shared contact between a top and bottom electrode is experimentally demonstrated; paving the way for a local back gate, possibly connected with the top gate by a 3D-shared contact. Assuming such a construct, we have performed extensive layout and spice simulations of standard cells and SRAMs. We evidence that the back-gate overlap on the source and drain must be minimized to mitigate the parasitic capacitances. The best layout configurations of a loaded 1-finger inverter yields a 24% frequency gain at a given static power and V dd = 0.6V supply voltage, compared to SG, or to a static power divided by 5, compared to SG under Forward Body Bias (FBB). These performance boosts may be obtained without any area penalty and assuming a 20nm-thin BOX. Similarly, a 29% improvement of the read and write currents of 6T SRAMs is contemplated at V dd = 0.8V. Such new functionality provided by 3D-monolithic even enables making 4T SRAMs that are fully functional at V dd = 0.8V by improving their retention and, in turn, the maximum number of bitcells per column from 50 (SG) to 300 with a dynamic back-bias.