Alternative technology for fabrication of nano- or microstructured mould inserts used for optical components
2010
For mass production of multiscale-optical components, micro- and nanostructured moulding tools are needed. Metal
tools are used for hot embossing or injection moulding of microcomponents in plastics. Tools are typically produced by
classical forming processes such as mechanical manufacturing e.g. turning or milling, laser manufacturing or electrical
discharge machining (EDM). Microstructures with extremely tight specifications, e.g. low side wall roughness and high
aspect ratios are generally made by lithographic procedures such as LIGA or DPW technology. However, these
processes are unsuitable for low-cost mass production. They are limited by the exposure area and structure design.
In cooperation with international partners alternative manufacturing methods of moulding tools have been developed at
the Institute of Microstructure Technology (IMT). In a new replication procedure, mould inserts are fabricated using
micro- and nanoscale optics. The multiscale structured prototypes, either in plastics, glass, metal or material
combinations are used as sacrificial parts. Using joining technology, electroforming and EDM technology, a negative
copy of a prototype is transferred into metal to be used as a moulding tool. The benefits of this replication technique are
rapid and economical production of moulding tools with extremely precise micro- and nanostructures, large structured
area and long tool life. Low-cost mass replication is possible with these moulding tools. In this paper, an established
manufacturing chain will be presented. Multiscale and multimaterial optical prototypes e.g. out-of-plane coupler or
microinterferometer were made by DPW or laser technology. The mould insert fabrication of each individual
manufacturing step will be shown. The process reliability and suitability for mass production was tested by hot
embossing.
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