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Probing the limitations of Sigmund's model of spatially resolved sputtering using Monte Carlo simulations
Probing the limitations of Sigmund's model of spatially resolved sputtering using Monte Carlo simulations
2016
G. Hobler
R. Mark Bradley
Herbert M. Urbassek
Keywords:
Sputtering
Monte Carlo method
Physics
Statistical physics
Condensed matter physics
Computational physics
spatially resolved
Correction
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