Polycrystalline black silicon texturization treatment fluid, polysilicon chip texturization method applying treatment fluid, and polycrystalline black silicon texturization product

2015 
The invention provides a polycrystalline black silicon texturization treatment fluid. The polycrystalline black silicon texturization treatment fluid comprises a hydrofluoric acid solution, a hydrogen peroxide solution and a metal salt, wherein a volume ratio of the hydrofluoric acid solution to the hydrogen peroxide solution is 1-25:5-40, the mass fraction of hydrofluoric acid in the hydrofluoric acid solution is 40-50%, the mass fraction of hydrogen peroxide in the hydrogen peroxide solution is 20-55%, the metal salt is at least one of copper nitrate, silver nitrate, palladium nitrate, copper chloride, auric chloride acid, chloroplatinic acid, potassium chromate and nickel sulfate, and the mole concentration of the metal salt is 1-10 [mu]mol/L. The invention also provides a polysilicon chip texturization method applying the polycrystalline black silicon texturization treatment fluid, and a polycrystalline black silicon texturization product.
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