Bistability in a CMOS-MEMS Thermally Tuned Microbeam Resonator
2018
A nonlinear electromechanical model for microbeam resonators considering, among others, the thermal effect is presented and compared to experimental data. The model is used to determine the conditions to achieve bistability and is validated on a submicrometer scale CMOS-MEMS resonator using thermal tuning.
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