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Scalable Linear Ion Beam Source for Sputter, PECVD, and Ion Beam Assisted Deposition
Scalable Linear Ion Beam Source for Sputter, PECVD, and Ion Beam Assisted Deposition
2018
Robert E. Weiss
Keywords:
Sputtering
Ion beam
Ion beam-assisted deposition
Plasma-enhanced chemical vapor deposition
Analytical chemistry
Materials science
Optoelectronics
Correction
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