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Thin film circuits for future applications. Part 1: Basic investigations and sputtering technique
Thin film circuits for future applications. Part 1: Basic investigations and sputtering technique
1976
K. H. Hoppe
Wilfried Dipl Phys Juergens
Helmold Dipl Phys Kausche
G. Kiessling
L. Lassak
H.P. Lorenz
H. Poetzlberger
Manfred Dipl Phys Dr Rer.Nat Roschy
Alois Schauer
Keywords:
Optoelectronics
Resistor
Capacitor
Thin film
Aluminium
Sputtering
Ultra-high vacuum
Tantalum
Nickel
Materials science
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