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Microlense Fabrication by the Modified LIGA Process and Hot Embossing Process
Microlense Fabrication by the Modified LIGA Process and Hot Embossing Process
2002
Sk Lee
Hakjun Lee
Seung-Seob Lee
Th Kwon
Keywords:
LIGA
Composite material
Embossing
Materials science
hot embossing
Nanotechnology
Fabrication
Correction
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