Miniaturized Photoacoustic Gas Sensor for CO 2

Gas sensing is one of the key topics in the area of environmental sensing. Besides the automotive sector, consumer markets with air quality applications also require a huge number of cheap devices. In this chapter, a new sensor system is described, based on the photoacoustic effect and realized in a ceramic package. The new sensor systems perfectly suit the requirements of a modern and state of the art gas sensor for the high-volume market.