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Imaging Superjunctions in CoolMOS Devices Using Electron Beam Induced Current
Imaging Superjunctions in CoolMOS Devices Using Electron Beam Induced Current
2012
Stefan Kirnstötter
Martin Faccinelli
P. Hadley
R. Job
Werner Schustereder
Johannes Georg Laven
H.-J. Schulze
Keywords:
Electron beam-induced current
Analytical chemistry
Materials science
Optoelectronics
Correction
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