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Verification of the relation between two-probe and four-probe resistances as measured on silicon wafers
Verification of the relation between two-probe and four-probe resistances as measured on silicon wafers
1990
Joseph J. Kopanski
John Albers
G. P. Carver
James R. Ehrstein
Keywords:
Analytical chemistry
Electrical resistivity and conductivity
Wafer
Silicon
Spreading resistance profiling
Chemistry
Optoelectronics
semiconductor materials
Mineralogy
Correction
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