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Fabrication of Manganese Nitride Thin Films by Ultrahigh-Field Sputtering
Fabrication of Manganese Nitride Thin Films by Ultrahigh-Field Sputtering
2016
Toshiki Matsumoto
Takahiko Kawaguchi
Takafumi Hatano
Shunta Harada
K. Iida
Toru Ujihara
Hiroshi Ikuta
Keywords:
Antiperovskite
Thin film
Physical vapor deposition
Sputtering
Nitride
Materials science
Manganese
Inorganic chemistry
Optoelectronics
ultrahigh field
Fabrication
Correction
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