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Surface Activated Bonding of Glass Using Aluminum Oxide Intermediate Layer for Microchannel Fabrication
Surface Activated Bonding of Glass Using Aluminum Oxide Intermediate Layer for Microchannel Fabrication
2020
Kai Takeuchi
Fengwen Mu
Yoshiie Matsumoto
Beomjoon Kim
Tadatomo Suga
Keywords:
Fabrication
Chemical engineering
intermediate layer
Microchannel
Surface activated bonding
Materials science
Aluminum oxide
Correction
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