Magnetische LIGA-Mirkoaktoren

Magnetic actuators are preferentially used for an efficient generation of force and torque in all areas of technology. Due to a poor scaling of electromagnetic forces with decreasing size and due to the complicated 3D-structure of coils with an internal core their fabrication seemed unpromising and too problematic within microsystem technologies. However, new prototypes of magnetic LIGA-microactuators obtain forces of nearly 20 mN and displacements of 200 μm.