A versatile double aberration-corrected, energy filtered HREM/STEM for materials science

Abstract A HREM/STEM incorporating aberration correctors in both the probe-forming and imaging lenses has been installed at Oxford University. This unique instrument is also equipped with an in-column energy-loss ( Ω -type) filter, HAADF detectors above and beneath the filter, and an EDX system. Initial tests have shown it to be capable of ∼0.1 nm resolution in both TEM and HAADF STEM imaging modes. Some examples of applications are finally presented.