Laser induced fluorescence as a technique for investigations of sputtering phenomena

Sputtering investigations by means of laser induced resonance fluorescence (LIF) using dye lasers are reviewed. The basic principles as well as various effects and experimental problems inherent to the method are briefly discussed. Some results on population distributions, velocity distributions of sputtered atoms in the ground state and metastable states, the influence of oxygen coverage as well as transient effects are presented. The discussion is intended to show the potential of the this method in sputtering investigations.