Flow Phenomena in Micro-Channel Filling Process (I) - Flow Visualization Experiment -

Micro-injection molding and microfluidic devices with the help of MEMS technologies including the LIGA process are expected to play important roles in micro-system industries, in particular the bio-application industry, in the near future. Understanding fluid flows in micro-channels is important since micro-channels are typical geometry in various microfluidic devices and mold inserts for micro-injection molding. In the present study, Part 1, an experimental investigation has been carried out to understand the detailed flow phenomena in micro-channel filling process. Three sets of micro-channels of different thickness (40um,30um and 2011m) were fabricated using SU-8 on silicon wafer substrate. And a flow visualization system was developed to observe the filling flow into the micro-channels. Experimental flow observations are extensively made to find the effects of pressure, inertia force, viscous force and surface tension. A dimensional analysis for experimental results was carried out and several relationships A dimensionless parameters are obtained.