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CMOS Compatible Poly-SiGe Cantilevers With Read/Write System For Probe Storage Device
CMOS Compatible Poly-SiGe Cantilevers With Read/Write System For Probe Storage Device
2009
Simone Severi
John Heck
Tsung-Kuan Chou
Nickolai Belov
J.S. Park
D. Harra Ii
A. Jain
R Van Hoof
B. Du Bois
J. De Coster
O Varela
Myriam Willegems
Jan Vaes
Geraldine Jamieson
L. Haspeslagh
Donald Edward Adams
Rao
Stefaan Decoutere
Ann Witvrouw
Keywords:
Cantilever
CMOS
Embedded system
Electronic engineering
Materials science
Optoelectronics
cmos compatible
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