Two-dimensional photonic crystals fabrication and close-packing by electron-beam lithography

Dmitry E. Utkin,D. A. Nasimov,A.V. Latyshev

Two-dimensional photonic crystals fabrication and close-packing by electron-beam lithography

2012

Dmitry E. Utkin
D. A. Nasimov
A.V. Latyshev

It is brought an approach of creation and close-packing two-dimensional photonic crystals with given sizes of elements by the EBL. The main problems of formation these structures were considered.

Keywords:

X-ray lithography
Electron-beam lithography
Stencil lithography
Yablonovite
Multiphoton lithography
Photonic metamaterial
Next-generation lithography
Optoelectronics
Materials science
Photonic crystal
Optics

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