Integrated pressure sensor with large range and linear measurement based on SiO2 arrayed waveguide grating (AWG)

Abstract Integrated pressure sensor based on SiO2 arrayed waveguide grating (AWG) for large range and linear measurement is realized. By analyzing the shape change and photoelastic effect of the arrayed waveguides, the change trend of AWG’s central wavelength with pressure is calculated. AWG pressure sensor is fabricated by standard planar lightwave technology. The measured variation on central wavelength with pressure, 0.01853 nm/MPa, shows good linearity and agrees well with the theoretical calculation (0.01729 nm/MPa). The AWG sensor can withstand 40 MPa pressure and the resolution is 0.011% FS (Full-scale). The measurement results are not affected by the distortion and power attenuation of light source. Therefore, in addition to the temperature effect, the sensor is long-term calibration free.